No products
View larger IEC 63068-4 Ed. 1.0 en:2022
M00013683
New product
IEC 63068-4 Ed. 1.0 en:2022 Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 4: Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence
standard by International Electrotechnical Commission, 07/01/2022
In stock
More info
Full Description
This part of IEC 63068 provides a procedure for identifying and evaluating defects in as-grown 4H-SiC (Silicon Carbide) homoepitaxial wafer by systematically combining two test methods of optical inspection and photoluminescence (PL). Additionally, this document exemplifies optical inspection and PL images to enable the detection and categorization of defects in SiC homoepitaxial wafers.