IEC 63229 Ed. 1.0 en:2021 Semiconductor devices - Classification of defects in gallium nitride epitaxial film on silicon carbide substrate

standard by International Electrotechnical Commission, 04/07/2021

Full Description

IEC 63229:2021(E) gives guidelines for the definition and classification of defects in GaN epitaxial film grown on SiC substrate. They are identified and described on the basis of examples, mainly by schematic illustrations, optical microscope images, and transmission electron microscope images for these defects. This document covers only defects in as-grown GaN epitaxial film on SiC substrate and does not include defects caused by subsequent processes.